Laser Doping Machine

This is a technology that greatly reduces the cost of the process and increases the energy conversion efficiency.

Description

The most important thing in photovoltaic power generation, which is spotlighted as the next generation energy source, is the technology to improve energy conversion efficiency. In order to increase the efficiency of the solar cell, when making a solar module, it is necessary to reduce the contact resistance in the process of attaching a metal electrode on the silicon substrate. By using a 532nm wavelength laser, you can reduce the contact resistance by creating a ‘selective emitter’ structure that makes a high concentration doping on the contact part of the metal electrode and thins the doping on the other part. Laser doping technology simplifies the existing complex method. This is a technology that greatly reduces the cost of the process and increases the energy conversion efficiency.

차세대 에너지원으로 각광받고 있는 태양광 발전에서 가장 중요한 것은 에너지 변환효율을 향상시키는 기술입니다. 태양전지의 효율을 높이기 위해서는 태양광 모듈을 만들 때 실리콘 기판 위에 금속전극을 붙이는 과정에서 접촉 저항을 줄여야 합니다. 532nm 파장의 레이저를 활용하여 금속전극의 접촉 부분에는 고농도 도핑을 하고 다른 부분에는 도핑을 얇게 하는 ‘선택적 에미터’ 구조를 만들면 접촉 저항을 줄일 수 있으며, 레이저 도핑 기술은 기존의 복잡한 방법을 간소화해서 공정에 소요되는 비용을 크게 줄이고 에너지 변환효율도 높일 수 있는 일석이조의 기술입니다.

Workstation
1. Optics and stages mounted on internal granite on vibration isolators
2. Ray MAX software for system control
3. Interlocked work area door with laser safe viewing window
4. Workstation size: 1100 mm [W] x 1100 mm [D] x 1850 mm [H]

Laser
1. Laser type: TEM00
2. Wavelength: 532nm
3. Average power: 15 W

Optical system
1. Spot size: < 30 um
2. Scanning Area: 212mm x 212mm (f=330)

Substrate mount
1. Vacuum chuck for 156mm x 156mm wafer
2. Levellable by precision screws

Motion stage
1. Travel range: 400 mm (X/Z stage – Linear motor)
2. Resolution: 5 µm

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