μ LAB Basic

Micromachining System – Scanner mode

Application :
1. Small Area : under 180mm × 180mm
2. Wafer Cutting
3. ITO/FTO, Thin Metal patterning
4. Polymer

Description

– Laser wavelength:  355/532/1064 nm
– Scanner with Off-axis camera
– Image detection and monitoring
– Simultaneous quality inspection during processing
– Controllable illuminations for homogeneous intensity