μ LAB Basic
Micromachining System – Scanner mode
Application :
1. Small Area : under 180mm × 180mm
2. Wafer Cutting
3. ITO/FTO, Thin Metal patterning
4. Polymer
Description
– Laser wavelength: 355/532/1064 nm
– Scanner with Off-axis camera
– Image detection and monitoring
– Simultaneous quality inspection during processing
– Controllable illuminations for homogeneous intensity
