μ LAB Advance – AI Alignment

Micromachining System with machine vision alignment

Application :
1. Small Area : under 180mm × 180mm
2. Wafer Cutting
3. ITO/FTO, Thin Metal patterning
4. Polymer

Description

– Laser wavelength:  355/532/1064 nm
– Scanner with Off-axis camera
– Pattern recognition & alignment (Machine Vision)
– Image detection and monitoring
– Simultaneous quality inspection during processing
– Controllable illuminations for homogeneous intensity

AI Alignment Demo

 

Off-axis Vision

 

Laser Alignment Tool (Machine Vision)

Laser Alignment Tool ( Machine Vision )

 

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