μ LAB Advance – AI Alignment
Micromachining System with machine vision alignment
Application :
1. Small Area : under 180mm × 180mm
2. Wafer Cutting
3. ITO/FTO, Thin Metal patterning
4. Polymer
Description
– Laser wavelength: 355/532/1064 nm
– Scanner with Off-axis camera
– Pattern recognition & alignment (Machine Vision)
– Image detection and monitoring
– Simultaneous quality inspection during processing
– Controllable illuminations for homogeneous intensity
AI Alignment Demo
Off-axis Vision
Laser Alignment Tool (Machine Vision)
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