Micro LAB Advance – AI Alignment

Micro LAB Advance – AI Alignment

Application :

  1. Small Area : under 180mm × 180mm
  2. Wafer Cutting
  3. ITO/FTO, Thin Metal patterning
  4. Polymer

– Laser wavelength:  355/532/1064 nm
– Scanner with Off-axis camera
– Pattern recognition & alignment (Machine Vision)
– Image detection and monitoring
– Simultaneous quality inspection during processing
– Controllable illuminations for homogeneous intensity

AI Alignment

Off-axis Vision

Laser Alignment Tool (Machine Vision)